Products:
Electronics
Our portfolio includes a complete line of current and next generation of precursors for depositing ultra-thin dielectric and metal films, strippers, electroplating chemistry (copper through Silicon via plating chemistry) and equipment for delivering specialty chemicals with technical know-how to enable collaborative innovation.
High Purity Specialty Chemicals
Semiconductor Silicon | |
---|---|
Application | Chemicals |
Doping | TEB, TEPO, TMP, TMPO, IMPI BBr3, POCI3 |
Dielectrics | TEOS, BTBAS, 2NTe, LTO-520 |
High K | TMAI |
Low K | TOMCATS, 4MS (CVD low-K for Lam’s Coral Process) DEMS, PDEMS (CVD ultra low-K AMAT Process) |
Metallization | TDMAT (CVD TiN) TiCL4, CupraSelect (CVD Cu) |
Oxidation & Cleaning | Trans-LC |
High Purity Performance Chemicals
Strippers
Etchants
Photolithography related chemicals
Post-CMP cleaners
Ultra-Pure Process Chemicals
Acids
Bases
Solvents
Chemical delivery systems
High Purity Metalorganics
Application: Compound Electronics & Si-Electronics industry
Trimethyaluminum (TMAI)
Low Ox-Trimethyaluminum (TMAI LO)
Triethyaluminum (TEAI)
Trimethygallium (TMGa)
Triethylgallium (TEGa)
Trimethyindium (TMln)
Bis(cyclopentadienyl)magnesium (Cp2Mg)
Dimethylzinc (DMZn)
>30
Approved Suppliers
>120
High Purity and Specialty Materials from USA, Japan, South Korea, Germany, China, Taiwan & Singapore